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Triaxial high-g accelerometer of microelectro mechanical systems 预览

Triaxial high-g accelerometer of microelectro mechanical systems
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摘要 A triaxial high-g accelerometer of microelectro mechanical systems(MEMS)has a structure of multi-chips combination and will be used in aerospace field,civil and military fields.The accelerometer can measure the acceleration of the carrier.The chips with island-membrane structures on its back surfaces are made by MEMS dry processing.The chip is reasonable and can work well under high impact load;Titanium alloy base is also stronger in high shock environment,these are proved by finite element analysis.Finally,the MEMS combined triaxial high-g accelerometer is validated by high impact calibration experiments in order to get a key performance index,including range,sensitivity and transverse sensitivity and so on.These data can satisfy the need of design but some problems remain,these will be eliminated by improvement of the processing technology and materials. A triaxial high-g accelerometer of microelectro mechanical systems (MEMS) has a struc- ture of multi-chips combination and will be used in aerospace field, civil and military fields. The ac- celerometer can measure the acceleration of the carrier. The chips with island-membrane structures on its back surfaces are made by MEMS dry processing. The chip is reasonable and can work well under high impact load; Titanium alloy base is also stronger in high shock environment, these are proved by finite element analysis. Finally, the MEMS combined triaxial high-g accelerometer is vali- dated by high impact calibration experiments in order to get a key performance index, including range, sensitivity and transverse sensitivity and so on. These data can satisfy the need of design but some problems remain, these will be eliminated by improvement of the processing technology and materials.
作者 HE Xu ZHANG Zhen-hai LI Ke-jie LIN Ran HE Xu;ZHANG Zhen-hai;LI Ke-jie;LIN Ran;School of Mechatronical Engineering,Beijing Institute of Technology;
出处 《北京理工大学学报:英文版》 EI CAS 2015年第4期427-431,共5页 Journal of Beijing Institute of Technology
基金 Supported by the National Natural Science Foundation of Chi- na (61273346) the National Defense Major Fundamental Re- search Program of China (20110003) the National Defense Key Fundamental Research Program of China ( 20132010 ) Specialized Research Fund for the Doctoral Program of Higher Education (20121101120009) Excellent Young Scholars Re- search Fund of Beijing Institute of Technology (2012YG0203) the Program for the Fundamental Research of Beijing Institute of Technology ( 2015CX02034 )
关键词 自动化元件 发送器 分配器 配电器 combined finite element analysis triaxial high-g accelerometer
作者简介 Author for correspondence, associate professor, Ph. D. E-mail: zhzhang@ bit. edu. cn
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