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MEMS微半球谐振陀螺的力反馈模态及其FPGA平台实现 预览 被引量:3

Force Feedback Mode of MEMS Micro Hemisphere Resonant Gyroscope and its FPGA Patform
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摘要 MEMS(micro-electro-mechanical system)微型陀螺仪具有体积小、质量轻、功耗低、成本低等优点,MEMS微半球谐振陀螺是MEMS微陀螺领域的研究热点,文中分析了微半球谐振陀螺的工作原理以及检测方法。针对MEMS微半球谐振陀螺高工作频率,高品质因数等特点,提供了一种数字式力反馈模式下的MEMS微半球谐振陀螺数字式闭环控制检测方案以及其FPGA平台硬件实现,完成目前MEMS微半球谐振陀螺的控制与检测工作。 MEMS micro gyroscopes have the advantages of small volume, light weight, consuming low power and low cost. MEMS micro hemisphere resonant gyroscope is research hotspot in the field of MEMS micro gyroscopes. This paper analyzed the working principle and detection method of micro hemisphere resonant gyroscope. According to the characteristics of high working frequency and high quality factor of micro hemisphere resonant gyroscope, a digital closed-loop control and detection method for MEMS micro hemisphere resonant gyroscope in force feedback mode and FPGA platform hardware implementation were provided, accomplishing the work of control and detection of MEMS micro hemisphere resonant gyroscope.
作者 孙殿竣 张卫平 唐健 邢亚亮 欧彬 刘朝阳 SUN Dian-jun,ZHANG Wei-ping ,TANG Jian,XING Ya-liang ,OU Bin,LIU Chao-yang (National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education, Shanghai Key Lab of Navigation and Location-based Services, Department of Micro-Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China)
出处 《仪表技术与传感器》 CSCD 北大核心 2017年第6期141-144,149共5页 Instrument Technique and Sensor
关键词 MEMS微半球谐振陀螺 力反馈 闭环控制 FPGA MEMS micro hemisphere resonant gyroscope force feedback closed-loop FPGA
作者简介 孙殿竣(1992-),硕士研究生,主要研究方向为MEMS惯性技术电路系统,E—mail:sundj@sjtu.edu.cn 张卫平(1971-),研究员,博士生导师,主要研究方向为微机电系统,微惯性技术和微机器人技术。E-mail:zhangwp@sjtu.edu.cn.
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  • 1[1] lynch D,Matthews A,Varty G T.Innovative mechanizations to optimize inertial sensor for high or low rate operations[A].Symposium Gyro TechnoLogy[C],1997. 被引量:1
  • 2YOO J H, MARSCHNER U, FLATAU A B. Preliminary Galfenol vibratory gyro-sensor design [C] //Proceedings of SPIE. San Diego, CA, USA , 2005, 5764: 111- 119. 被引量:1
  • 3AYAZI F, NAJAFI K. A HARPSS polysilicon vibrating ring gyroscope [J].Microelectromechanical Systems, 2001, 10 (2): 169- 179. 被引量:1
  • 4GEIGER W, BUTT W U, DEWXH J, et al. Deeoupled microgyroscopes and the design principle DAVED [J]. Sensors Actuators: A, 2002, 95 (2): 239-249. 被引量:1
  • 5YAZDI N, AYAZI F, NAJAFI K. Mieromachined inertial sensors[J].Proceedings of the IEEE, 1998, 86 (8): 1640- 1659. 被引量:1
  • 6GREIFF P, BOXENHORN B, KING T, et al. Silicon monolithic micromechanical gyroscope [C] //Proceedings of the 1991 International Conference on Solid-State Sensors and Actuators. SanFranciseo, CA, USA, 1991: 966-968. 被引量:1
  • 7BERNSTEIN J, CHO S, KING A T, et al. A micromachined comb-drive tuning fork rate gyroscope [C] // Proceedings of Micro Electro Mechanical Systems. Fort Lauderdale, FL, 1993: 143-148. 被引量:1
  • 8LIU K, ZHANG W P, CHEN W Y, et al. The development of micro-gyroscope technology[J]. Journal of Micromeeha- nics and Microengineering, 2009, 19 (11): 113001. 被引量:1
  • 9ACAR C, SHKEL A M. Structurally decoupled micromachined gyroscopes with post-release capacitance enhancement [J]. Journal of Micromechanics and Microengineering, 2005, 15 (5).. 1092-1101. 被引量:1
  • 10ALPER S E, SILAY K M, AKIN T. A low-cost rate-grade nickel micro-gyroscope [J]. Sensors and Actuators: A, 2006, 132 (1): 171-181. 被引量:1

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