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高电荷态电子回旋共振离子源难熔金属高温炉研制

Design of high temperature oven for refractory metallic ion beam production in high charge state ECR ion source
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摘要 高电荷态电子回旋共振(Electron Cyclotron Resonance,ECR)离子源产生金属离子束的方法有炉子加热法、溅射法、MIVOC(Metallic Ion from Volatile Compounds)等,其中炉子加热法具有产生的束流强度高、稳定性好的特点。炉子加热法的技术核心是加热炉,按其工作温区主要分为低温炉、高温炉两大类。高温炉主要针对熔点1 500°C以上的金属钴、钛、钒、铂、铀等。通过ANSYS仿真模拟分析了高温炉钽坩埚的温度分布、高温下因膨胀所受热应力及其在ECR离子源工作环境的强磁场中所受的安培力作用。根据模拟分析结果研制了电阻式加热高温炉,并对其进行了离线测试,实验中钽坩埚在1 800°C以上发生的形变与ANSYS模拟结果相符,并根据模拟分析给出了改进方案。改进后的电阻式加热高温炉离线测试能在1 500°C稳定维持48 h以上,而在1 846°C时可稳定维持达6 h以上,结果表明:研制的电阻式加热高温炉可应用于ECR离子源产生强流高电荷态难熔金属离子束。 [Background] The methods to produce metallic ions in high charge state electron cyclotron resonance(ECR) ion source are micro-oven method, sputtering method and metallic ion from volatile compounds(MIVOC) method and so on, amongst which the micro-oven method can help produce high intensity and high reliability ion beams. There are mainly two types of micro-oven in use, i.e. low temperature oven and high temperature oven. [Purpose] High temperature oven is especially used for metals with melting temperature over 1 500 °C, such as cobalt, titanium, vanadium, platinum, uranium, etc. [Methods] Using ANSYS, simulation and analysis of the temperature distribution on a tantalum crucible of high temperature oven, its thermal stress at high temperature and Ampere’s force under the strong ECR ion source magnetic field working condition have been performed. [Results] According to the test, the deformation of tantalum crucible over 1 800 ℃ after off-line test is consistent with the simulation in the ANSYS well, which puts forward an improved scheme. And the improved resistor heating micro-oven can remain stable at 1 500 ℃ for 48 h and 1 846 ℃ for 6 h in the off-line test. [Conclusion] The designed resistor heating micro-oven can be used in ECR ion source for the production of high intensity highly charged refractory metallic ion beams.
作者 黄维 钱程 孙良亭 张雪珍 曹云 卢旺 冯玉成 郭俊伟 方兴 李锡霞 赵红卫 HUANG Wei1,2,QIAN Cheng2,SUN Liangting2,ZHANG Xuezhen2,CAO Yun2,LU Wang2,FENG Yucheng2,GUO Junwei2,FANG Xing2,LI Xixia2,ZHAO Hongwei2 (1.University of Science and Technology of China,Hefei 230027, China; 2.Institute of Modern Physics,Chinese Academy of Sciences, Lanzhou 730000, China)
出处 《核技术》 CSCD 北大核心 2018年第7期46-52,共7页 Nuclear Techniques
基金 科技部“973”专项(No.2014CB845500) 国家自然科学基金(No.11427904)资助
关键词 ECR离子源 电阻加热 高温炉 金属离子 ECR ion source Resister heating High temperature oven Metallic ions
作者简介 黄维,男,1993年出生,2014年于中国科学技术大学获硕士学位
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